diener electronic  |  Plasma-Surface-Technology Plasma Plasma systems Surface-Technology
 
german english spanish english turkish italian french
russian polish czech chinese japanese taiwanese korean
home
  plasma technique
  glossary of terms
  FAQ
  products
  low pressure plasma
    Yocto
    Zepto - low-cost
    Atto - low-cost
    Femto
    Femto UHP
    Femto PCCE
    Pico
    Pico UHP
    Nano
    Nano UHP
    Tetra-30-LF
    Tetra-30-LF-PC
    Tetra-100-LF
    Tetra-100-LF-PC
    Tetra-150-LF
    Tetra-150-LF-PC
    special systems
    system schemes
    structure variation
    controls
    options/accessories
    electron microscopy
    pirani vacuum meter
  atmospheric plasma
  generators
  plasma indicator tags
  microwave coupling
  plasma-exhaust
cleaning
  services
  representatives
  references
  download area
  trade fairs
  contact us
  approach
  about us
   
 

STANDARD PLASMA SYSTEMS

 

[ PLASMA SYSTEM TETRA-100-LF-PC - PLASMA ETCHER ]

   
  The production plasma system TETRA-100-LF-PC with 100 litres chamber volume and PC-control is used in the production for cleaning, etching and activation.
   
  Brochure TETRA (PDF 815 KB)
   
   
 
 

Technical Data:
Plasma etcher TETRA-100-LF-PC

switchgear cabinet:
W 600 mm, H 2.200 mm, D 800 mm
chamber:
W 400 mm, D 625 mm, H 400 mm
chamber volume:
approx. 100 litres
gas supply:
max. 3 gas channels through MFC
generator:
40kHz/0-2500 W
(optional: 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type D40B (40 m³/h)
trays:
up to 10 trays
(optional: rotary drum)
control:
PC control (Windows)

options / accessories

 
Plasma system TETRA-100-LF-PC - Plasma etcher

Plasma system TETRA-100-LF-PC for cleaning, activation and etching in production.

rotary drum for TETRA - plasma systems

Sixfold tray and rotary drum for TETRA plasma systems.
   
   
  Please contact us if you have technical questions.
   
   
  home | plasma technique | glossary of terms | FAQ | plasma systems | plasma system rental | wage labour | consulting | links/representatives | references | download | trade fairs | contact | approach | about us | imprint
  © 2015 Diener electronic GmbH + Co. KG    Webdesign Heindl Internet AG