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STANDARD PLASMA SYSTEMS TETRA 100

[ PLASMA CLEANER - PLASMA ETCHER - PLASMA ASHER - PLASMA ACTIVATION ]



The TETRA 100 plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.

Give us a call! We´d be happy to discuss more details. Tel.: +49 (0) 7458 - 999 31 - 0

Brochure TETRA 100 (PDF)


Basic configuration

- The outer body varies depending on the components / options
- >Chamber volume: depending on the version 80 - 100 liters
- Power supply: 230 V AC for table top systems or
   400 V / AC 3 phases for stand alone systems

Gas supply

- Mass-Flow-Controller (MFCs)

Vacuum chambers

- Stainless steel
    round with cover
    (approx. Ø 400 mm, L 625 mm) or
    rectangular with hinged door
    (approx. W 400 x H 400 x D 625 mm)


Loading with

  Tray (option: water-cooled), quartz glass boat,
  rotary drum for powder, rotary drum for bulk materials,
  flat tray Aluminium, flat tray stainless steel,
  flat tray borosilicate glass, flat tray quartz glass

Electrodes

- One or multi level electrode
- RIE - electrode

Control

- PCCE-Control (Microsoft Windows CE)
- PC-Control (Microsoft Windows XPE)

Pressure measurement

- Pirani sensor
- Baratron (for the corrosive gas version)

Timer

- Digital

Generator

  Frequencies:    40 kHz: Power 0 - 1000 W; 0 - 1500 W, 0 - 2500W
                      13.56 MHz: Power 0 - 300 W; 0 - 600 W; 0 - 1000W
                        2.45 GHz: Power 0 - 1200W

  All generators are continuously adjustable from 0 - 100%

Vacuum pump

- in different sizes from different manufacturers
  (As required with active carbon filter)


Here are some examples of our
TETRA 100 housings



Plasmasystem TETRA 100 version A: Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher
 Tetra 100 example version A


Plasmasystem TETRA 100 version B for series production, Process development, cleaning, activating, etching
 Tetra 100 example version B



Please contact us for technical advice regarding these systems.

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