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PLASMA SYSTEMS - PRODUCTION OF SPECIAL PLASMA SYSTEMS

[ PLASMA CLEANER - PLASMA ETCHER - PLASMA ASHER - PLASMA ACTIVATION ]



We build the plasma cleaner according to your needs. It is necessary to consider the following points:
  • sample size
  • expected output and yield

Brochure Special Systemes (PDF 1284 KB)


Special plasma cleaner:


Special cleaner Tetra-15-LF-PC


Technical data:

Control cabinet
W 600 mm, H 1.700 mm, D 800 mm
W 23.6 in, H 66.9 in, D 31.4 in
Chamber:
W 360 mm, H 150 mm, D 260 mm
W 14.1 in, H 5.9 in, D 10.2 in
Chamber volume:
approx. 30 litres (4 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

Plasma Sputer System Tetra 15 LF-PC, Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher

The TETRA 15 plasma system is configured with a sputtering system for high-vacuum-based coating technology and for cleaning processes in preparation of highly pure surfaces.


Special cleaner Tetra-30-LF-PC


Technical data:

Control cabinet:
W 800 mm, H 600 mm, D 500 mm
W 31.5 in, H 23.6 in, D 19.7 in
Chamber:
W 240 mm, H 150 mm, D 240 mm
W 9.4 in, 5.9 in, 9.4 in
Chamber volume:
approx. 30 litres (8 gallons)
Gas supply:
1 gas channel via MFC
Generator:
1 pc. 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus
Automation:
The system can be integrated into an production line.

Short cycle plasma system Tetra 30 LF-PC for cleaning, etching, activating any surface A video from the short cycle plasma system Tetra 30 LF-PC

A short cycle plasma system can easily be integrated into an existing production line. This automatic system will also reduce operator error.



Special cleaner Tetra-100-LF-PC


Technical data:

Control cabinet:
W 2,000 mm, H 2,200 mm, D 2,000 mm
W 78.7 in, H 86.6 in, D 78.7 in
Chamber:
W 700 mm, H 200 mm, D 700 mm
W 27.5 in, H 7.9 in, D 27.5 in
Chamber volume:
approx. 100 litres (26 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
1 pc. at 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus
Automation:
The system has a fully automatic drawer door.

Special plasma system Tetra 100 LF-PC, Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher

The plasma system Tetra -100 with 100 litres of chamber volume and a fully automatic door is PC controlled and used primarily for serial production (cleaning, etching and activation).



Special cleaner Tetra-120-LF-PC


Technical data:

Control cabinet:
W 600 mm, H 2,150 mm, D 1,000 mm
W 23.6 in, H 84.6 in, D 39.4 in
Chamber:
W 1,200 mm, H 150 mm, D 1,700 mm
W 47.2 in, H 5.9 in, D 66.9 in
Chamber volume:
approx. 120 litres (32 gallons)
Gas supply:
4 gas channels via MFCs
Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus
Automation:
The system has a fully automatic door.

Special plasma system Tetra 120 LF-PC for cleaning, etching, activating any surface A video from the plasma system Tetra 120 LF-PC

The plasma system Tetra -120 with 120 litres of chamber volume and a fully automatic door is PC controlled and used primarily for serial production (cleaning, etching and activation).



Special cleaner Tetra-130-LF-PC


Technical data:

Control cabinet:
W 1,800 mm, H 2,100 mm, D 1,300 mm
W 70.8 in, H 82.7 in, D 51.2 in
Chamber:
W 400 mm, H 400 mm, D 810 mm
W 15.7 in, H 15.7 in, D 31.9 in
Chamber volume:
approx. 130 litres (34,5 gallons)
Gas supply:
3 gas channels via MFCs
monomer dispensor for plasma polymerization
Generator:
1 pc. at 13.56 MHz
(optional: 40 kHz)
Control:
PC controlled (Windows) with industrial fieldbus
Features:
UHV area with a turbopump

Special plasma system Tetra 130 LF-PC, Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher

The plasma system Tetra -130-LF-PC with 130 litres of chamber volume is PC controlled and used primarily for serial production (cleaning, etching, activation and plasma polymerization).



Special cleaner Tetra-140-LF


Technical data:

Control cabinet:
W 600 mm, H 2,100 mm, D 650 mm
W 23.6 in, H 82.7 in, D 25.6 in
Chamber:
W 1,200 mm, H 700 mm, D 1,500 mm
W 47.2 in, H 27.5 in, D 59 in
Chamber volume:
approx. 140 litres (37 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
1 pc. at 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 140 LF, Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher

The plasma system Tetra -140-LF-PC with 140 litres of chamber volume is PC controlled and used primarily for serial production (cleaning, etching, activation and plasma polymerization).



Special cleaner Tetra-140-LF-PC


Technical data:

Control cabinet:
W 1,000 mm, H 1,800 mm, D 1,000 mm
W 39.4 in, H 70.8 in, D 39.4 in
Chamber:
W 1,000 mm, H 100 mm, D 1,400 mm
W 39.4 in, H 3.9 in, D 55.1 in
Chamber volume:
approx. 140 litres (37 gallons)
Gas supply:
2 gas channels via MFCs, liquid monomer dispensor
for plasma polymerization
Generator:
1 pc. at 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 140 LF PC for cleaning, etching, activating any surface

The plasma system Tetra -140-LF-PC with 140 litres of chamber volume is PC controlled and used primarily for serial production (cleaning, etching, activation and plasma polymerization).



Special cleaner Tetra-150-LF-PC


Technical data:

Control cabinet:
W 1,000 mm, H 2,100 mm, D 1,000 mm
W 39.4 in, H 82.7 in, D 39.4 in
Chamber:
W 400 mm, H 600 mm, D 625 mm
W 15.7 in, H 23.6 in, D 24.6 in
Chamber volume:
approx. 150 litres (40 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
1 pc. at 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus
Automation:
Roll to roll for rolls that are 400 mm (15.7 in) wide and 300 mm (11.81 in) diameter..

Special plasma system Tetra 150 LF-PC, Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher

The plasma system Tetra -150 - LF - PC with 150 litres of chamber volume is PC controlled and used primarily for the serial production of textile materials on which different monomers are plasma polymerized.



Special cleaner Tetra-185-LF-PC


Technical data:

Control cabinet:
W 600 mm, H 2,100 mm, D 1,000 mm
W 23,6 in, H 82.7 in, D 39.4 in
Chamber:
W 400 mm, H 665 mm, D 700 mm
W 15.7 in, H 26.2 in, D 27.6 in
Chamber volume:
approx. 185 litres (48.9 gallons)
Gas supply:
4 gas channels via MFCs
Generator:
1 pc. at 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 185 LF-PC, Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher, printed curcuit boards, PCB

The plasma system Tetra -185 - LF - PC with 185 litres of chamber volume is PC controlled and used primarily for the production of printed circuit boards.



Special cleaner Tetra-210-LF-PC


Technical data:

Control cabinet:
W 1,560 mm, H 2,350 mm, D 1,860 mm
W 61.42 in, H 92.52 in, D 73.23 in
Chamber:
W 1,000 mm, H 200 mm, D 1,400 mm
W 39.3 in, H 7.8 in, D 55.1 in
Chamber volume:
ca. 210 Liter (56 gallons)
Gas supply:
2 Gaskanäle über MFCs
Generator:
1 pc. at 40 kHz
(Optional: 13,56 MHz o. 2,45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 150 LF-PC, Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher

The plasma system Tetra - 210 LF PC and 210 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning and coating).



Special cleaner Tetra-240-LF-PC


Technical data:

Control cabinet:
W 600 mm, H 1,700 mm, D 3,200 mm
W 23.6 in, H 66.9 in, D 126 in
Chamber:
W 305 mm, H 300 mm, D 2,600 mm
W 12 in, H 11.8 in, D 102.4 in
Chamber volume:
approx. 240 litres (63 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
1 pc. at 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 240 LF-PC, Plasmacleaner, Plasmaasher, Plasmaactivation, Plasmaetcher

The plasma system Tetra - 240 with 240 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special cleaner Tetra-260-LF-PC


Technical data:

Control cabinet:
W 2,500 mm, H 2,200 mm, D 1,000 mm
W 98.4 in, H 86.6 in, D 39.4 in
Chamber:
W 650 mm, H 500 mm, D 800 mm
W 25.6 in, H 19.7 in, D 31.5 in
Chamber volume:
approx. 260 litres (68.4 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
10 pc. at 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 260 LF-PC for cleaning, etching, activating any surface

The plasma system Tetra - 260 with 260 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special cleaner Tetra-375-LF-PC


Technical data:

Control cabinet:
W 600 mm, H 2,100 mm, D 800 mm
W 23.6 in, H 82.7 in, D 31.5 in
Chamber:
W 600 mm, H 360 mm, D 1,900 mm
W 23.6 in, H 14.2 in, D 74.8 in
Chamber volume:
approx. 375 litres (99 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 375 LF-PC, Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher

The plasma system Tetra-375 with 375 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special cleaner Tetra-400-LF-PC


Technical data:

Control cabinet:
W 600 mm, H 2,100 mm, D 650 mm
W 23.6 in, H 82.7 in, D 25.6 in
Chamber:
W 915 mm, H 750 mm, D 725 mm
W 36 in, H 29.5 in, D 28.5 in
Chamber volume:
approx. 400 litres (106 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus
Automation:
The system has a fully automatic sliding door.

Special plasma system Tetra 400 LF-PC for cleaning, etching, activating any surface

The plasma system Tetra - 400 with 400 litres of chamber volume and a fully automatic sliding door is PC controlled and used primarily for serial production (cleaning, etching and activation).



Special cleaner Tetra-420-LF-PC-PCB


Technical data:

Control cabinet:
W 1,600 mm, H 2,100 mm, D 1,200 mm
W 63 in, H 82.7 in, D 47.2 in
Chamber:
W 750 mm, H 800 mm, D 750 mm
W 29.5 in, H 31.5 in, D 29.5 in
Chamber volume:
approx. 420 litres (111 gallons)
Gas supply:
4 gas channels via MFCs
Generator:
4 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 420 LF-PC-PCB, Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher

The plasma system Tetra - 420 with 420 litres of chamber volume is PC controlled and used primarily for production of PCBs (desmear process, cleaning, etching and activation).



Special cleaner Tetra-500-LF-PC


Technical data:

Control cabinet:
W 600 mm, H 2,100 mm, D 800 mm
W 23.6 in, H 82.6 in, D 31.5 in
Chamber:
W 1,500 mm, H 1,700 mm, D 200 mm
W 59 in, H 66.9 in, D 7.9 in
Chamber volume:
approx. 500 litres (132 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Trays:
2 roll-to-roll systems
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 500 LF-PC for cleaning, etching, activating any surface

The Tetra - 500 with the roll-to-roll system and 500 litres of chamber volume is PC controlled and used primarily for serial production (cleaning, etching and activation) such as foil.



Special cleaner Tetra-575-LF-PC


Technical data:

Control cabinet:
W 1,150 mm, H 1,900 mm, D 1,600 mm
W 45.3 in, H 74.8 in mm, D 63 in
Chamber:
W 600 mm, H 1.200 mm, D 800 mm
W 23.6 in, H 47.2, D 31.5 in
Chamber volume:
approx. 575 litres (152 gallones)
Gas supply:
2 gas channels via MFCs
Generator:
1 pcs. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Trays:
Up to 22 trays
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 575 LF-PC for cleaning, etching, activating any surface A video from the plasma system Tetra 575 LF-PC

The plasma system Tetra - 575 - LF - PC and 575 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching, activation and coating).



Special cleaner Tetra-600-LF-PC


Technical data:

Control cabinet:
W 600 mm, H 2,200 mm, D 1.200 mm
W 23.6 in, 86.6 in, D 31.5 in
Chamber:
W 810 mm, H 810 mm, D 925 mm
W 39.4 in, H 39.4 in, D 23.6 in
Chamber volume:
approx. 600 litres (159 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHZ or 2.45 MHz)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 600 LF-PC: Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher A video from the plasma system Tetra 600 LF-PC

The plasma system Tetra - 600 with 600 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special cleaner Tetra-600-LF-PC Version 1


Technical data:

Control cabinet:
W 600 mm, H 2,200 mm, D 800 mm
W 23.6 in, 86.6 in, D 31.5 in
Chamber:
W 1,000 mm, H 1,000 mm, D 600 mm
W 39.4 in, H 39.4 in, D 23.6 in
Chamber volume:
approx. 600 litres (159 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHZ or 2.45 MHz)
Trays:
Up to 11 trays
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 600 LF-PC Vesion1: Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher

The plasma system Tetra - 600 with 600 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special cleaner Tetra-600-LF-PC Version 2


Technical data:

Control cabinet:
W 1,800 mm, H 1,800 mm, D 800 mm
W 70.9 in, H 70.9 in, D 31.5 in
Chamber:
W 580 mm, H 730 mm, D 1,000 mm
W 22.8 in, H 28.7 in, D 39.4 in,
door with 2 windows
Chamber volume:
approx. 600 litres (159 gallons)
Gas supply:
2 gas channels via MFC
Generator:
1 pc. at 40 kHz, automatic matching
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 600 LF-PC Vesion2 for cleaning, etching, activating any surface

The plasma system Tetra - 600 with 600 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special cleaner Tetra-600-LF-PC-D Version 1


Technical data:

Control cabinet:
W 600 mm, H 2,200 mm, D 800 mm
W 23.6 in, H 86.6 in, D 31.5 in
Chamber:
Ø 1,100 mm, D 700 mm
Ø 43.3 in, D 27.6 in
Chamber volume:
approx. 600 litres (159 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Trays:
Rotary drum (with four baskets, 30 litres each)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 600 LF-PC-D Vesion1: Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher

The plasma system Tetra - 600 with 600 litres of chamber volume and a rotary drum is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special cleaner Tetra-600-LF-PC-D Version 2


Technical data:

Control cabinet:
W 1,000 mm, H 2,200 mm, D 1,800 mm
W 39.4 in, H 86.6 in, D 70.9 in
Chamber:
Ø 1,000 mm, D 750 mm
Ø 39.4 in, D 29.5 in,
door with two windows
Chamber volume:
approx. 600 litres (159 gallons)
Gas supply:
2 gas channels via MFC
Generator:
4 pcs. with 40 kHz each
automatic matching
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 600 LF-PC-D Vesion2 for cleaning, etching, activating any surface

The plasma system Tetra - 600 with 600 litres of chamber volume and a rotary drum is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special vacuum cleaning system Tetra-1.600


Technical data:

Chamber:
W 900 mm, H 700 mm, D 2,600 mm
W 35.4 in, H 27,6 in, D 102.4 in
Chamber volume:
approx. 1,600 litres (422.7 gallons)

Special vacuum cleaning system Tetra 1600, vacuum drying

The plasma system Tetra - 1600 with 1,600 litres of chamber volume is used primarily for vacuum drying.



Special cleaner Tetra-2.000-RF-PC


Technical data:

Chamber:
W 1,000 mm, H 2,000 mm, D 1,000 mm
W 39.4 in, H 78.7 in, D 39.4 in
Chamber volume:
approx. 2,000 litres (529 gallons)
Gas supply:
2 gas channels via MFC
Generator:
1 pc. 13.56 MHz
Trays:
Up to 10 trays
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 2000 RF-PC, Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher

The plasma system Tetra - 2000 with 2,000 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning and activation).



Special cleaner Tetra-2400-LF-PC


Technical data:

Control cabinet:
W 600 mm, H 2,200 mm, D 800 mm
W 23.6 in, H 86.6 in, D 31.5 in
Chamber:
Ø 1,100 mm, D 2,500 mm
Ø 43.3 in, D 98.4 in
Chamber volume:
approx. 2,400 litres (635 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
4 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Trays:
Rotary drum (with 16 baskets, 30 litres each)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 2400 RF-PC for cleaning, etching, activating any surface

The plasma system Tetra - 2400 with 2,400 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special cleaner Tetra-2800-LF-PC


Technical data:

Control cabinet:
W 600 mm, H 1,700 mm, D 800 mm
W 23.6 in, H 66.9 in, D 31.5 in
Chamber:
Ø 1,200 mm, D 2,500 mm
Ø 47.2 in, D 98.4 in
Chamber volume:
approx. 2,800 litres (740 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
1 pc. at 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 2800 RF-PC, Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher A video from the plasma system Tetra 2800 LF-PC

The plasma system Tetra - 2800 with 2,800 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special cleaner Tetra-3000-LF-PC


Technical data:

Control cabinet 1:
W 1,200 mm, H 2,100 mm, D 600 mm
W 47.2 in, H 82.7 in, D 23.6 in
Control cabinet 2:
W 600 mm, H 2,200 mm, D 800 mm
W 23.6 in, H 86.6 in, D 31.5 in
Chamber:
W 1,200 mm, H 1,700 mm, D 1,510 mm
W 47.2 in, H 66.9 in, D 59.4 in
Chamber volume:
approx. 3,000 litres (793 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
4 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 3000 LF-PC, Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher

The plasma system Tetra-3000 with 3,000 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching, activation and sterilization).


Special cleaner Tetra-4400-LF-PC:


Technical data:

Control cabinet:
W 1,800 mm, H 1,000 mm, D 800 mm
W 70.8 in, H 39.4 in, D 31.5 in
Chamber:
L 1,350 mm, D 1,250 mm, H 2,600 mm
L 53.1 in, D 49.2 in, H 102.4 in
Chamber volume:
approx. 4,400 litres (1164 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
4 pcs. with 40 kHz each
(optional: 13.56 MHZ or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus
Features:
oxygen generator
roots pump plasma exhaust cleaner

Special plasma system Tetra 4400 LF-PC for cleaning, etching, activating any surface

The plasma system Tetra - 4400 - LF - PC with 4,400 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special cleaner Tetra-5600-LF-PC


Technical data:

Control cabinet:
W 1,800 mm, H 2,200 mm, D 1,800 mm
W 70.8 in, H 86.6 in, D 70.8 in
Chamber:
W 2,250 mm, H 2,450 mm, D 1,000 mm
W 88.6 in, H 96.5 in, D 39.4 in
Chamber volume:
approx. 5,600 litres (1,481 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
6 pcs. with 40 kHz each
(optional: 13.56 MHZ or 2.45 GHz)
Trays:
Trolleys are used to load the chamber
(Optional: special drum)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 5600 LF-PC, Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher

The plasma system Tetra - 5600 - LF - PC with 5,600 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning and activation).



Special cleaner Tetra-7000-LF-PC


Technical data:

Control cabinet:
W 2,400 mm, H 2,300 mm, D 1,000 mm
W 94.5 in, H 90.5 in mm, D 39.4 in mm
Chamber:
W 2,400 mm, H 2,100 mm, D 1,400 mm
W 94.5 in, H 82.7, D 55.1 in
Chamber volume:
approx. 7,000 litres (1,852 gallones)
Gas supply:
3 gas channels via MFCs
Generator:
4 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 7000 LF-PCfor cleaning, etching, activating any surface

The plasma system Tetra - 7000 - LF - PC with the roll-to-roll system and 7,000 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching, activation and coating).



Special cleaner Tetra-7300-LF-PC


Technical data:

Control cabinet:
W 600 mm, H 2,100 mm, D 1,200 mm
W 23.6 in, H 82.7 in, D 47.2 in
Chamber:
W 1,400 mm, H 2,100 mm, D 2,500 mm
W 55.1 in, H 82.7 in, D 98.4 in
Chamber volume:
approx. 7,300 litres (1,928.5 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
3 pcs with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 7300 LF-PC, Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher

The plasma system Tetra - 7300 - LF - PC with 7,300 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching, and activation).



Special cleaner Tetra-7500-LF-PC


Technical data:

Control cabinet:
W 3,000 mm, H 2,000 mm, D 1,000 mm
W 118.1 in, H 78.7 in, D 39.4 in
Chamber:
W 1,500 mm, H 2,000 mm, D 2,500 mm
W 59 in, H 78.7 in, D 98.4 in
Chamber volume:
approx. 7,500 litres (1,984 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
6 pcs with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 7500 LF-PC, Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher

The plasma system Tetra - 7500 - LF - PC with 7,500 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching, and activation).



Special cleaner Tetra-8000-LF-PC


Technical data:

Control cabinet:
W 2,000 mm, H 1,800 mm, D 1,000 mm
W 78.7 in, H 70.8 in, D 39.4 in
Chamber:
W 1,700 mm, H 1,700 mm, D 2,800 mm
W 66.9 in, H 66.9 in, D 110.2 in
Chamber volume:
approx. 8,000 litres (2,116 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
4 pcs with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 8000 LF-PC for cleaning, etching, activating any surface

The plasma system Tetra - 8000 - LF - PC with 8,000 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching, and activation).



Special cleaner Tetra-12.600-LF-PC


Technical data:

Control cabinet:
W 1,200 mm, H 2,200 mm, D 800 mm
W 47.2 in, H 86.6 in, D 31.5 in
Chamber:
W 2,400 mm, H 2,100 mm, D 2,500 mm
W 94.5 in, H 82.7 in, D 98.4 in
Chamber volume:
approx. 12,600 litres (3,333 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
6 pcs. with 40 kHz each
(optional: 13.56 MHZ or 2.45 GHz)
Trays:
Trolleys are used to load the chamber
Control:
PC controlled (Windows) with industrial fieldbus

Special plasma system Tetra 12600 LF-PC, Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher

The plasma system Tetra-12600 with 12,600 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning and activation).


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