diener electronic  |  Plasma-Surface-Technology Plasma Plasma systems Surface-Technology
 
german english spanish english turkish italian french
russian polish czech chinese japanese taiwanese korean
home
  plasma technique
  glossary of terms
  FAQ
  products
  low pressure plasma
    Zepto - low-cost
    Atto - low-cost
    Femto
    Femto UHP
    Femto PCCE
    Pico
    Pico UHP
    Nano
    Nano UHP
    Tetra-30-LF
    Tetra-30-LF-PC
    Tetra-100-LF
    Tetra-100-LF-PC
    Tetra-150-LF
    Tetra-150-LF-PC
    special systems
    system schemes
    structure variation
    controls
    options/accessories
    electron microscopy
    pirani vacuum meter
  atmospheric plasma
  generators
  plasma indicator tags
  microwave coupling
  plasma-exhaust
cleaning
  services
  representatives
  references
  download area
  trade fairs
  contact us
  approach
  about us
   

STANDARD PLASMA SYSTEMS

[ PLASMA SYSTEM FEMTO PCCE - PLASMA CLEANER ]



2 litres laboratory plasma system FEMTO with PCCE control is mainly used for:
  • small scale production
  • analysis (SEM, TEM)
  • medical technology
  • sterilisation
  • research and development
  • archaeology
  • textile treatment
  • semiconductor technology
  • plastic technology

Gain of Femto PCCE is:

  • a good cost/value ratio
  • good entry area in pC control


Technical Data: Plasma cleaner Femto PCCE


switchgear cabinet:
W 562 mm, H 211 mm, D 420 mm
chamber:
W 103 mm, H 103 mm, D 280 mm
chamber volume:
approx. 2,8 litre
gas supply:
2 pcs. gas channels through MFC
generator:
1000W limited by 100W
vacuum pump:
Leybold, Typ S1,5 (1,5m³/h)
tray :

1 pc. tray
control:
Windows CE control
Pressure sensor:
Pirani

Plasma system FEMTO PCCE: Process development, cleaning, activating, etching

 
Plasma system FEMTO PCCE: Process development, cleaning, activating, etching
(small series)

options / accessories Price on request



The mentioned prices are without obligation.
Please contact us if you have technical questions.


  home | plasma technique | glossary of terms | FAQ | plasma systems | plasma system rental | wage labour | consulting | links/representatives | references | download | trade fairs | contact | approach | about us | imprint
  © 2009 Diener electronic GmbH + Co. KG    Webdesign Heindl Internet AG