 |
| |
STANDARD PLASMA SYSTEMS
|
| |
[ PLASMA SYSTEM FEMTO - PLASMA CLEANER ]
|
| |
|
| |
2 litres
laboratory plasma system FEMTO with semi-automatic control is mainly
used for:
- small scale production
- analysis (SEM, TEM)
- medical technology
- sterilisation
- research and development
- archaeology
- textile treatment
- semiconductor technology
- plastic technology
|
| |
Brochure
FEMTO (PDF 1007 KB) |
| |
All plasma systems can be combined in the most diverse variations. The following overview is a help to get an overview of the most usual plasma systems.
|
| |
|
| |
Technical Data:
Plasma cleaner Femto timer (version 1)
switchgear cabinet:
W 345 mm, H 220 mm, D 420 mm
chamber:
Ø 100 mm, L 270 mm
chamber volume:
approx. 2 litre
gas supply:
one gas channel through needle valve
generator:
40kHz/100 W, infinitely variable
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:
1 pc. tray
control:
semi-automatic control, process time
by timer
options / accessories
|
|
Plasma system FEMTO timer (version 1): Process development, cleaning, activating, etching
(small series)
|
Technical Data:
Plasma cleaner Femto PCCE
(version 2)
switchgear cabinet:
W 562 mm, H 211 mm, D 420 mm
chamber:
Ø 100 mm, L 280 mm
chamber volume:
ca. 2,8 litre
gas supply:
2 pcs. gas channel through MFC
generator:
40kHz/100W, infinitely
vacuum pump:
Leybold, Typ S1,5 (1,5m³/h)
tray:
1 pc. tray
control:
PC control
Optionen / Zubehör
|
|
Plasma system FEMTO PCCE (version 2) :
Process development, cleaning, activating, etching (small series)
PRICE on request
| Old LCD-display |
Innovative touchscreen |
|
Techncal Data:
Plasma cleaner Femto
(version 3)
switchgear cabinet :
W 345 mm, H 220 mm, D 420 mm
chamber:
Ø 100 mm, L 270 mm
chamber volume:
ca. 2 litre
gas supply:
1 gas supply through needle valve
generator:
13,56 MHz/50W, infinitely
vacuum pump:
Leybold, Typ S1,5 (1,5m³/h)
tray:
1 pc. tray
control:
manual, process time by timer
options / accessories
|
|
Plasma system FEMTO (version 3) :
Process development, cleaning, activating, etching
(small series)
PRICE on request |
Technical Data:
Plasma cleaner Femto
(version 4)
switchgear cabinet:
W 560 mm, H 310 mm, D 600 mm
chamber:
W 100 mm, H 100 mm, D 280 mm
chamber volume:
approx. 2 litre
gas supply:
one gas channel through needle valve
generator:
40kHz/100 W, infinitely variable
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:
1 pc. tray
control:
semi-automatic control, process time
by timer
options / accessories
|
|
Plasma system FEMTO (version 4):
Process development, cleaning, activating, etching
(with door)
Price on request |
|
| |
|
| |
Technical Data:
Plasma cleaner Femto
(version 5)
switchgear cabinet:
W 562 mm, H 211 mm, D 420 mm
chamber:
Ø 100 mm, L 270 mm
chamber volume:
approx. 2 litre
gas supply:
2 gas channel through needle valve
generator:
40kHz/100 W, infinitely variable
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:
1 pc. tray
control:
semi-automatic control, process time
by timer
Pressure sensor:
Pirani
options / accessories
|
Plasma system FEMTO (version 5) :
Process development, cleaning, activating, etching
(small series)
Price on request | |
| |
|
| |
Technical Data:
Plasma cleaner Femto
(version 6)
switchgear cabinet:
W 562 mm, H 460 mm, D 550 mm
chamber:
Ø 100 mm, L 270 mm
chamber volume:
approx. 2 litre
gas supply:
3 gas channel through MFC
generator:
40kHz/0-100 W
(option: 13,56 MHz o. 2,45 GHz)
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:
1 pc. tray
control:
PC control runs under Windows (To learn more about PC control, please refer to our pages.)
options / accessories |
Plasma system FEMTO-PC (version 6) :
Process development, cleaning, activating, etching (small series)
Price on request | |
| |
|
|
Technical Data:
Plasma cleaner Femto
(version 7)
switchgear cabinet:
W 320 mm, H 500 mm, D 420 mm
chamber:
W 100 mm, H 270 mm, D 280 mm
chamber volume:
approx. 2 litre
gas supply:
2 gas channel through needle valve
generator:
40kHz/100 W, infinitely variable
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:
1 pc. tray
control:
semi-automatic control, process time
by time or automatic
Pressure sensor:
Pirani
options / accessories
|
Plasma system FEMTO (version 7) : Process development, cleaning, activating, etching
(small series)
Price on request | |
| |
The mentioned prices are without obligation
Please contact us if you have technical questions.
|
| |
|
| |
|
|
|
