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STANDARD PLASMA SYSTEM FEMTO

[ PLASMA CLEANER - PLASMA ETCHER - PLASMA ASHER - PLASMA ACTIVATION ]



The FEMTO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.

Give us a call! We´d be happy to discuss more details. Tel.: +49 (0) 7458 - 999 31 - 0

Brochure FEMTO (PDF 1007 KB)


Basic configuration

- The outer body varies depending on the components / options
- Chamber volume: depending on the version 1,9 - 6 liters
- Power supply: 230 V AC for table top systems or
   400 V AC / 3 phases for stand alone systems

Gas supply

- Needle valve
- Mass-Flow-Controller (MFCs)

Vacuum chambers

- Stainless steel
    round with cover
    (approx. Ø 100 mm, L 278 mm oder L 600 mm) or
    rectangular with hinged door
    (approx. W 103 x H 103 x D 285 mm)

- Aluminium
    round with cover or with hinged door
    (approx. Ø 95 mm, L 280 mm or L 600 mm)

- Quartzglass (UHP)
    round with cover or with hinged door
    (approx. Ø 95 mm, L 280 mm or L 600 mm)

- Borosilicate glass (UHP)
    round with cover or with hinged door
    (approx. Ø 95 mm, L 280 mm or L 600 mm)

Loading with

  Tray (option: water-cooled), quartz glass boat,
  rotary drum for powder, rotary drum for bulk materials,
  flat tray Aluminium, flat tray stainless steel,
  flat tray borosilicate glass, flat tray quartz glass

Electrodes

- One or multi level electrode
- RIE - electrode

Control

- Semi automatic
- PCCE-Control (Microsoft Windows CE)
- PC-Control (Microsoft Windows XPE)

Timer

- Digital

Generator

  Frequencies:     40 kHz: Power 0 - 100 W; 0 - 1000 W
                       13.56 MHz: Power 0 - 50 W; 0 - 300 W
                         2.45 GHz: Power 0 - 100 W; 0 - 300 W

  All generators are continuously adjustable from 0 - 100%

Vacuum pump

- in different sizes from different manufacturers
  (As required with active carbon filter)


 

Here are some examples of our
FEMTO housings



Femto version 1: Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher
 FEMTO example version 1


Femto version 2 for cleaning, etching, activating any surface
 FEMTO example version 2


Femto version 3: Plasma cleaner, Plasma asher, Plasma activation, Plasma etcher
 FEMTO example version 3


Femto version 4 for cleaning, etching, activating any surface
 FEMTO example version 4


Femto version 5: Plasma Cleaner, Plasma Asher, Plasma Activation, Plasma Etcher
 FEMTO example version 5


Plasma system FEMTO version 6 for small productions, Process development, cleaning, activating, etching
 FEMTO example version 6


Plasma system FEMTO version 7 with PC control, Plasmacleaner, Plasmaasher, Plasmaactivation, Plasmaetcher
 FEMTO example version 7


Plasma system FEMTO version 8 for small productions, Process development, cleaning, activating, etching
 FEMTO example version 8


Femto version 9: Plasma Cleaner, Plasma Asher, Plasma Activation, Plasma Etcher
 FEMTO example version 9

Please contact us for technical advice regarding these systems.

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