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Technical Data:
Plasma cleaner Atto
with manual control
switchgear cabinet:
W 425 mm, H 275 mm, D 450 mm
chamber:
glass,
Ø 211 mm, L 300 mm
chamber volume:
approx. 10,5 litres
gas supply:
2 gas channels through needle valve
generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching
vacuum pump:
suction power: 2m³/h
tray:
1 pc. tray
control:
manual, process time by timer
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Low-Cost Plasma system ATTO:
Process development, cleaning,
activating,
etching (small series)
PRICE: on request |
Technical Data:
Plasma cleaner Atto
with external PC control
(Windows XP)
switchgear cabinet:
W 525 mm, H 275 mm, D 450 mm
chamber:
glass,
Ø 211 mm, L 300 mm
chamber volume:
approx. 10,5 litres
gas supply:
2 gas channels via MFC
generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching
vacuum pump:
suction power: 2m³/h
tray:
1 pc. tray
control:
manual, process time by timer
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|
Low-Cost Plasma system ATTO:
Process development, cleaning,
activating,
etching (small series)
PRICE: on request |
Technical Data:
Plasma cleaner Atto
with built-in PC control
(Windows XP)
switchgear cabinet:
W 525 mm, H 275 mm, D 450 mm
chamber:
glass,
Ø 211 mm, L 300 mm
chamber volume:
approx. 10,5 litres
gas supply:
2 gas channels via MFC
generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching
vacuum pump:
suction power: 2m³/h
tray:
1 pc. tray
control:
manual, process time by timer
|
|
Low-Cost Plasma system ATTO:
Process development, cleaning,
activating,
etching (small series)
PRICE: on request |
Technical Data:
Plasma cleaner Atto
with built-in PCCE control
(Windows CE)
switchgear cabinet:
W 525 mm, H 275 mm, D 450 mm
chamber:
glass,
Ø 211 mm, L 300 mm
chamber volume:
approx. 10,5 litres
gas supply:
2 gas channels via MFC
generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching
vacuum pump:
suction power: 2m³/h
tray:
1 pc. tray
control:
manual, process time by timer
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