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GLOSSARY OF TERMS

 

[ Plasma colour ]

   
 

Plasma color is caused by emission of high energetic atoms, ions or molecules during relaxation to less energetic states. As the energy states in every gas have different differences, every process gas features different characteristic emissions and hence different characteristic colors. The typical colours of several gases frequently employed in plasma processes are as follows:
CF4: blue
SF6: white blue
SiF4: light blue
SiCl4: light blue
Cl2: whitish green
CCl4: whitish green
H2: pink
O2: pale yellow
N2: red to yellow
Br2: reddish
He: red to violet
Ne: brick red
Ar: dark red
Apart from the determination of the process gas, the plasma colour can also be used for a qualitative estimation of the process gases purity from contaminations.

   
   
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